Application of Mems Inductors in Sensors and Rf Components

The design of sensors and RF components has increasingly made use of microelectromechanical systems (MEMS) technology or micromachining. The quality-factor of inductors on silicon and the reduction of substrate losses requires approaches as the use of MEMS technology. The MEMS technology had emerged from the conventional silicon processes with the aim to utilize the well-established microstructuring technology but to exploit the excellent mechanical rather than the electrical characteristics of silicon. Passive components, especially inductors, used often determine the size and performance of systems and current research efforts in MEMS aimed at performing these functions mechanically should make it possible to realize the entire transducer and RF transcever monolithic ally, reducing size, weight, cost and power.